Metrology Solutions

  1. Micro Lens Process Metrology System: Compass™ Series
    7/27/2017

    Zygo® offers the new Compass™ Micro Lens Process Metrology System with automated, non-contact 3D surface metrology and process control capabilities for discrete micro lenses and molds critical to compact imaging systems and cameras for smart phones and tablets. Two Compass™ models are available for different metrology needs.

  2. Ultra-High-Resolution Verifire™ HDX Laser Interferometer System For 3D Metrology
    6/23/2017

    Zygo introduces the new Verifire™ HDX laser interferometer system designed for precise 3D metrology and mid-spatial frequency content characterization of extreme performance optical components and systems. The HDX system includes all of the features of the Verifire HD, and adds enhancements such as the best-in-class imaging and resolution for high instrument transfer function (ITF), and superior characterization of mid-spatial frequency content and high-slope surface deviations.

  3. Absolute Position Measurement System: ZPS System
    10/27/2016

    The new ZPS™ System from Zygo Corporation is designed to measure absolute position via ultra-compact optical sensors with a resolution of 0.01 nm and less than 1 nm of non-linearity. The system is typically used for closed-loop feedback systems that require continuous streams of high-precision position data from multiple sensors to maintain precise positioning and alignment.

  4. Vibration-Tolerant Interferometry QPSI™ Technology
    4/7/2016

    Precision interferometric metrology faces the challenge of environmental vibrations which can ruin countless precision measurements. Vibration affects measurement results and spatial frequency analysis, making it difficult to make high quality optics without reliable measurements. Zygo’s QPSI technology eliminates this problem with measurements that require no special setup or calibration, and cycle times are typically within a second or two of standard PSI measurements.

  5. APM650™ Packaging Metrology System
    4/7/2016

    ZYGO offers the new APM650™ packaging metrology system designed to provide 2D and 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision. This inspection tool is ideal for the automated measurement of panel based PCBs and other advanced packaging applications.

  6. Portable Optical Profiler: Nomad
    4/7/2016

    The Nomad profiler from Zygo Corporation is a small, lightweight portable optical profiler ideal for situations where the measurement of an object’s surface is too large for the measurement stage of a conventional workstation profiler. 

  7. Large-Aperture Interferometer Workstation: Verifire XL
    6/30/2015

    The VerifireTM XL is a large-aperture, downward-viewing interferometer workstation designed for simple metrology of large flat surfaces up to twelve inches in diameter. The VerifireTM XL workstation comes with QPSI acquisition technology that enables true on-axis surface form metrology, without degradation from production floor vibrations.

  8. ZeGage™ Plus 3D Optical Surface Profiler
    6/30/2015

    The ZeGageTM Plus optical surface profiler is designed with sub-nanometer precision, scans up to twice as fast as the ZeGage™ profiler, and has an increased range of measureable surfaces. The interactive control software, Mx™, is there to provide simple and detailed visualization for better control of the process.

  9. Verifire™ HD Interferometer System
    6/29/2015

    ZYGO's new VerifireTM HD Interferometer System is designed to provide transmitted wavefront measurements of optical components and assemblies, and fast, high-resolution measurements of flat or spherical surfaces. The system features a high-speed, 2k x 2k pixel CCD camera and an optimized optical design to reliably measure surface features.  The Mx™ software package provides the ability to calculate mid-spatial frequency content with Power Spectral Density (PSD) and the diffraction simulation tool.

  10. ZeGage™ 3D Optical Surface Profiler
    2/24/2015

    The ZeGage™ is a scanning white light interferometer that provides 3D optical surface profiling for the measurement of precision surfaces that require non-contact metrology. Unlike other optical surface profilers, this system maintains high resolution at all seven of its magnification options. It’s also not affected by the environment it operates in. You can take it out of the QA lab, place it directly beside your production equipment, and still get a 3D surface roughness measurement of precision machined surfaces with nanometer level precision.