Large Format Inspection And Metrology System: Nexview™ LS650


Zygo’s Nexview™ LS650 is a large format metrology system designed as an inspection tool for automated measurement of injection molding tooling, PCBs, glass panels, and other samples requiring an extended work volume up to 650 x 650 mm. It provides 2D and 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision.

The Nexview™ LS650 system utilizes Coherence Scanning Interferometry (CSI) measurement technology at its core. This non-contact technology offers high-precision, and high-value surface metrology benefits including measurements of all types of surfaces, sub-nanometer measurements, gage capable performance, and SureScan™ vibration tolerance technology.

For more features and specifications on the Nexview™ LS650, download the datasheet.