The ZeGage™ Pro and ZeGage™ Pro HR are scanning white light interferometers that provide 3D optical surface profiling for the measurement of precision surfaces that require non-contact metrology. The base ZeGage™ Pro model delivers surface mapping at the nanometer scale, meeting the needs for most industrial surfaces. For smoother samples with a much finer surface finish, the ZeGage™ Pro HR offers more than 20X higher precision with 0.15 nm vertical precision.
The ZeGage™ profilers are constructed with a compact benchtop-friendly design. These profilers also feature SureScan™ technology for vibration robust metrology, and ZYGO's Part Finder and Smart Setup tools make sample changes fast and easy, minimizing wasted time and maximizing throughput.
- Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility.
- Quantitative surface metrology with nanometer-level precision provides superior gage capability.
- High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization.
- Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorized part stage.)
For more information on how the ZeGage 3D optical surface profiler’s powerful visualization, quantitative results, simultaneous 2D and 3D metrology, and interactive tools can increase precision, decrease costs, and save your organization time, download the datasheets.