Metrology Solutions

  1. Large Format Inspection And Metrology System: Nexview™ LS650 2/8/2021

    Zygo’s Nexview™ LS650 is a large format metrology system designed as an inspection tool for automated measurement of injection molding tooling, PCBs, glass panels, and other samples requiring an extended work volume up to 650 x 650 mm. It provides 2D and 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision.

  2. Production Ready 3D Optical Profiler: ZeGage™ Pro 1/4/2019

    The ZeGage™ Pro and ZeGage™ Pro HR are scanning white light interferometers that provide 3D optical surface profiling for the measurement of precision surfaces that require non-contact metrology. The base ZeGage™ Pro model delivers surface mapping at the nanometer scale, meeting the needs for most industrial surfaces. For smoother samples with a much finer surface finish, the ZeGage™ Pro HR offers more than 20X higher precision with 0.15 nm vertical precision.

  3. 3D Optical Surface Profilers: NewView 9000 3/15/2018

    Zygo Corporation's NewView 9000 instrument is based on innovative and versatile non-contact optical technologies. Ideal applications include research, precision engineering, quality control, and advanced manufacturing.

  4. Micro Lens Process Metrology System: Compass™ Series 7/27/2017

    Zygo® offers the new Compass™ Micro Lens Process Metrology System with automated, non-contact 3D surface metrology and process control capabilities for discrete micro lenses and molds critical to compact imaging systems and cameras for smart phones and tablets. Two Compass™ models are available for different metrology needs.

  5. Ultra-High-Resolution Verifire™ HDX Laser Interferometer System For 3D Metrology 6/23/2017

    Zygo introduces the new Verifire™ HDX laser interferometer system designed for precise 3D metrology and mid-spatial frequency content characterization of extreme performance optical components and systems. The HDX system includes all of the features of the Verifire HD, and adds enhancements such as the best-in-class imaging and resolution for high instrument transfer function (ITF), and superior characterization of mid-spatial frequency content and high-slope surface deviations.

  6. Absolute Position Measurement System: ZPS System 10/27/2016

    The new ZPS™ System from Zygo Corporation is designed to measure absolute position via ultra-compact optical sensors with a resolution of 0.01 nm and less than 1 nm of non-linearity. The system is typically used for closed-loop feedback systems that require continuous streams of high-precision position data from multiple sensors to maintain precise positioning and alignment.

  7. Vibration-Tolerant Interferometry QPSI™ Technology 4/7/2016

    Precision interferometric metrology faces the challenge of environmental vibrations which can ruin countless precision measurements. Vibration affects measurement results and spatial frequency analysis, making it difficult to make high quality optics without reliable measurements. Zygo’s QPSI technology eliminates this problem with measurements that require no special setup or calibration, and cycle times are typically within a second or two of standard PSI measurements.

  8. APM650™ Packaging Metrology System 4/7/2016

    ZYGO offers the new APM650™ packaging metrology system designed to provide 2D and 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision. This inspection tool is ideal for the automated measurement of panel based PCBs and other advanced packaging applications.

  9. Large-Aperture Interferometer Workstation: Verifire XL 6/30/2015

    The VerifireTM XL is a large-aperture, downward-viewing interferometer workstation designed for simple metrology of large flat surfaces up to twelve inches in diameter. The VerifireTM XL workstation comes with QPSI acquisition technology that enables true on-axis surface form metrology, without degradation from production floor vibrations.

  10. Verifire And Verifire™ HD Interferometer System 6/29/2015

    ZYGO's Verifire and VerifireTM HD Interferometer System is designed to provide transmitted wavefront measurements of optical components and assemblies, and fast, high-resolution measurements of flat or spherical surfaces. The system features a high-speed, 2k x 2k pixel CCD camera and an optimized optical design to reliably measure surface features.  The Mx™ software package provides the ability to calculate mid-spatial frequency content with Power Spectral Density (PSD) and the diffraction simulation tool.