positioning-equipment-whitepapers

  1. Nano-Scale Imaging/Fabrication Advances Driven By Piezoelectric Active Vibration Control
    3/22/2010
    Engineers from TMC and PI have developed active vibration isolation technology based on piezo ceramic solid state actuators that has become an established solution in nano-lithography applications. However, active vibration cancellation can also improve stability and resolution in super-resolution microscopy applications. Based on digital signal processing algorithms and responsive PI piezo technology with the latest ultra-reliability enhancements, patented STACIS active isolators have proven their dependability in mission-critical fab deployment for over a decade. STACIS is now available in small form-factors ideal for emerging applications ranging from advanced microscopies to nanomanufacturing.
  2. Application Note: Reduce Cost Of Optics And Final Assembly: The Benefits Of Laser-Reflection Based Ultra-Precision Active Alignment
    1/28/2010
    Aligning and centering lenses for cementing or positioning in an optical system poses different challenges depending on the final precision requirements and the methods used during alignment. Desired quality, efficiency, cost of components and capital investment all play important roles in selecting the correct assembly method. The LASER ALIGNMENT AND ASSEMBLY STATION™ (LAS) is a dynamic laser reflection based, non-contact, real-time optical centration and angular measurement instrument, designed for aligning lenses in a multi-element optical system, such as a telescope, microscope objective or microlithography stepper. The LAS’s optical module provides strong, clear reflections by which the user can easily measure and record sub-micron Total Indicated Runout (TIR) for spheric, aspheric, parabolic, cylindric, coated, or uncoated optics with radius of curvatures from 2.0mm to infinity, without changing objectives. By Steve Bohuczky and Sasha Perlman, Opto-Alignment Technology, Inc.