Datasheet | January 4, 2019

Production Ready 3D Optical Profiler: ZeGage™ Pro HR Datasheet

Source: Zygo Corporation

The ZeGage™ Pro HR is a scanning white light interferometer that provides 3D optical surface profiling for the measurement of precision surfaces that require non-contact metrology. It HR offers more than 20X higher precision with 0.15 nm vertical precision for smoother samples with a much finer surface finish. For more information on how the ZeGage 3D optical surface profiler’s powerful visualization, quantitative results, simultaneous 2D and 3D metrology, and interactive tools can increase precision, decrease costs, download the datasheet.