The Nano-Man5 is a 5-axis piezo nanopositioning system with closed loop feedback control for absolute position measurement. The compact design makes it easy to integrate into existing instrumentation. The Nano-Man5 is designed for alignment applications that require 3 linear axes combined with tip/tilt capabilities. The included position sensors ensure picometer and nanoradian accuracy under closed loop control.
The Nano-Man5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt”. Internal position sensors utilizing proprietary. The Nano-Man5 is a 5-axis closed loop nanopositioning system constructed from aluminum. PicoQ® technology provides absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models.
For more information on the Nano-Man5 nanopositioning system, download the available datasheet.