Five Axis Piezo Nanopositioning System: Nano-Man5 Datasheet

The Nano-Man5 is a 5-axis piezo nanopositioning system with closed loop feedback control for absolute position measurement. The compact design makes it easy to integrate into existing instrumentation. The Nano-Man5 is designed for alignment applications that require 3 linear axes combined with tip/tilt capabilities. The included position sensors ensure picometer and nanoradian accuracy under closed loop control. For more information on the nanopositioning system, download the datasheet.