ZeGage™ Plus 3D Optical Surface Profiler

Source: Zygo Corporation

3D Optical Surface Profiler: ZeGage Plus

The ZeGageTM Plus optical surface profiler is designed with sub-nanometer precision, scans up to twice as fast as the ZeGage™ profiler, and has an increased range of measureable surfaces. The interactive control software, Mx™, is there to provide simple and detailed visualization for better control of the process.

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The ZeGage™ Plus optical profiler has powerful performance as its proprietary non-contact measurement technology dramatically reduces vibration effects. This new profiler is extremely versatile in measuring a wide variety of surfaces ranging from rough to super smooth, including finishes such as ground, honed, lapped, and super-polished on materials like glass, ceramic, and metal. The ZeGage™ Plus features more than 20x better surface topography repeatability than the standard ZeGage, while correlating with both 2D and 3D standards.

For more features, system options, and benefits of the ZeGage™ Plus, download the datasheet.

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