Datasheet | June 30, 2015

3D Optical Surface Profiler ZeGage™ Plus Datasheet

Source: Zygo Corporation
3D Optical Surface Profiler: ZeGage Plus

The ZeGageTM Plus is an optical surface profiler designed with sub-nanometer precision, scans up to twice as fast as the ZeGage profiler, and has an increased range of measureable surfaces. This new profiler is extremely versatile in measuring a wide variety of surfaces ranging from rough to super smooth, including finishes such as ground, honed, lapped, and super-polished on materials like glass, ceramic, and metal. For more features, system options, and benefits of the ZeGageTM Plus, download the datasheet.