News | December 13, 2017

Opto Diode Introduces 13.5 nm Directly-Deposited Thin-Film Filter Photodetectors

Source: Opto Diode, An ITW Company
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Opto Diode Introduces 13.5 nm Directly-Deposited Thin-Film Filter Photodetectors

Opto Diode Corporation, an ITW company, introduces the SXUV100TF135 and SXUV100TF135B photodiodes with integrated thin-film filters. The detectors each feature a 100 mm2 active area and a directly-deposited thin-film filter for detection between 12 nm and 18 nm. Both detectors have typical responsivity of 0.09 A/W at 13.5 nm and are optimized for different electrical performance. The photodiodes are ideal for use in applications such as laser power monitoring, semiconductor photolithography, and metrology systems that utilize extreme ultraviolet light.

The SXUV100TF135 model is optimized for higher speed reverse bias voltage operation. The device has low capacitance, typically 260 pF, with a reverse bias voltage of 12 volts.  The SXUV100TF135B is optimized for zero bias voltage operation where low dark current is of paramount importance. The detector has a high shunt resistance greater than 10 MΩ.

Opto Diode’s photodiodes with integrated thin-film filters offer superior stability and a robust design for use in extreme ultraviolet environments. Operating and storage temperatures range from -10 °C to +40 °C in ambient environments and from -20 °C to +80 °C in nitrogen or vacuum environments. Both devices are shipped with protective covers.

For more information about integrated thin-film filters, other photodiode packages, and optical filter assemblies, please email sales@optodiode.com or visit: http://optodiode.com/photodiodes-filter.html.

Opto Diode Corporation (Camarillo, CA - www.optodiode.com), an ITW Company, delivers industry-leading sensors, photodiodes, IR detectors, photonic modules, assemblies, and LEDs. Available in standard and custom designs, Opto Diode products have earned a reputation for high performance, superior quality and reliability for over 30 years. Opto Diode offers advanced performance sensors from the extreme ultraviolet (UV) to the mid-infrared (mid-IR). Our products provide unparalleled high-energy particle, electron, X-ray, and UV detection along with superior sensitivity to discriminate trace gases or detect heat, sparks, or flames in the mid-IR spectrum.  Other products include high performance LEDs with radiometric emissions from 365 to 940 nm and IR emitters covering 1 to 10 microns.

Opto Diode serves a variety of industries including aerospace, automotive, biotechnology, food processing, medical, military/defense, industrial, semiconductor equipment manufacturing, and test & measurement.  Our manufacturing process is in a cleanroom environment, from start to finish.  Opto Diode’s domestic U.S. facility is optimized for design and manufacturing with an on-site wafer fabrication, class 1,000 to class 10,000 clean rooms, extensive assembly capabilities and packaging expertise.  From prototyping to high-volume production, we manufacture wafers-to-components then package and assemble photonic modules-to-optoelectronic sub-systems. For more information, visit www.optodiode.com.

SOURCE: Opto Diode, An ITW Company