News | May 29, 2020

Opto Diode Introduces An Extreme Ultraviolet (EUV) Photodetector – SXUV5


CAMARILLO, Calif. – May 28, 2020 - Opto Diode Corporation, an ITW company, introduces the SXUV5, an extreme ultraviolet (EUV) photodiode with a circular active area of 2.5 mm diameter. The new device has superior responsivity in the 1 nm to190 nm wavelength region, and is specially designed to be highly stable over long periods of time when exposed to high-intensity EUV energy. The new photodetector joins Opto Diode’s family of SXUV photodiodes with varying active area sizes to meet critical measurements, speed, and power monitoring performance objectives.

The SXUV5 is housed in a windowless, TO-5 package to allow for responsivity at wavelengths shorter than 150 nm. Other features include shunt resistance of 20 MOhms (minimum) and reverse breakdown voltage of 5 Volts (minimum) to 20 Volts (typical). Capacitance is 500 pF (typical) to 1500 pF (maximum), and response time is from 1 nsec (typical) to 2 nsec (maximum).

Storage and operating temperatures range from -10 °C to +40 °C (ambient) and from -20 °C to +80 °C in nitrogen or vacuum environments. The lead soldering temperature is 260 °C.

For additional information and to view the responsivity graphs for the SXUV5 EUV photodetectors, please go to Opto Diode’s data sheet here:

Opto Diode Corporation (Camarillo, CA -, an ITW Company, delivers industry-leading sensors, photodiodes, IR detectors, photonic modules, assemblies, and LEDs. Available in standard and custom designs, Opto Diode products have earned a reputation for high performance, superior quality and reliability for over 30 years. Opto Diode offers advanced performance sensors from the extreme ultraviolet (UV) to the mid-infrared (mid-IR). Our products provide unparalleled high-energy particle, electron, X-ray, and UV detection along with superior sensitivity to discriminate trace gases or detect heat, sparks, or flames in the mid-IR spectrum.  Other products include high performance LEDs with radiometric emissions from 365 to 940 nm and IR emitters covering 1 to 10 microns.

Opto Diode serves a variety of industries including aerospace, automotive, biotechnology, food processing, medical, military/defense, industrial, semiconductor equipment manufacturing, and test & measurement.  Our manufacturing process is in a cleanroom environment, from start to finish.  Opto Diode’s domestic U.S. facility is optimized for design and manufacturing with an on-site wafer fabrication, class 1,000 to class 10,000 clean rooms, extensive assembly capabilities and packaging expertise.  From prototyping to high-volume production, we manufacture wafers-to-components then package and assemble photonic modules-to-optoelectronic sub-systems. For more information, visit     

Source: Opto Diode Corporation