News | February 5, 2020

MKS Announces Ophir® Pulse Energy Sensor With Highest Damage Threshold For Concentrated Laser Beams


February 5, 2020 - Andover, MA - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has announced the Ophir® PE50U-DIFH-C Pulse Energy Sensor at SPIE Photonics West 2020. Designed for use with high power pulsed lasers operating in demanding conditions, the sensor features special materials that can measure UV radiation down to 193nm, high repetition rates up to 10KHz, and high energy densities up to 1J/cm2 at 193nm and 2J/cm2 above 240nm.

Ideal for use in medical, semiconductor, and scientific research applications, the PE50U-DIFH-C energy sensor operates over a wide range of wavelengths, power levels, and repetition rates. It is calibrated at 193nm, 248nm, 355nm, 532nm, 1064nm, 2100nm, and 2940nm to ensure the highest levels of accuracy. It has a 35mm aperture and can measure energies from 10µJ to 10J. A special diffuser delivers the highest energy density damage threshold available, up to 90J/cm2 for ms pulses.

The PE50U-DIFH-C pulse energy sensor features a "Smart Connector" interface that operates with any of Ophir's smart displays, including the Centauri, StarBright, Vega, Nova II, and StarLite, as well as the company's PC interfaces.

Availability & Pricing
The PE50U-DIFH-C pulse energy sensor is available now. OEM prices available on request.


About MKS Instruments
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration control, optics and laser-based manufacturing solutions. We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include semiconductor, industrial technologies, life and health sciences, research and defense. Additional information can be found at

About the Ophir Brand
Ophir is a brand within the MKS Instruments Light & Motion division. The Ophir product portfolio consists of laser and LED measurement products, including laser power and energy meters, laser beam profilers measuring femto-watt to hundred-kilowatt lasers, high-performance IR and visible optical elements, IR thermal imaging lenses and zoom lenses for defense and commercial applications, OEM and replacement high-quality optics and sub-assemblies for CO2 and high-power fiber laser material processing applications. Ophir products enhance our customers' capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, research and defense markets. For more information, visit

Source: MKS Instruments, Inc.