Verifire™ XL Large-Aperture Interferometer Workstation Datasheet
Source: Zygo Corporation

The Verifire™ XL large aperture interferometer comes with QPSI™acquisition technology that enables true on-axis surface form metrology, without degradation from production floor vibrations. The system features a heavy duty tip/tip/tilt stage providing repeatable part placement without needing custom fixturing. The MxTM measurement and analysis software provides unmatched measurement capability with its operational features, data visualization tools, and easy-to-use interface. For more information regarding VerifireTM XL features, specifications, and characteristics, download the datasheet.
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Zygo Corporation
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