Datasheet | June 30, 2015

Verifire™ XL Large-Aperture Interferometer Workstation Datasheet

Source: Zygo Corporation

Large-Aperture Interferometer Workstation: Verifire XL Datasheet

The Verifire™ XL large aperture interferometer comes with QPSI™acquisition technology that enables true on-axis surface form metrology, without degradation from production floor vibrations. The system features a heavy duty tip/tip/tilt stage providing repeatable part placement without needing custom fixturing. The MxTM measurement and analysis software provides unmatched measurement capability with its operational features, data visualization tools, and easy-to-use interface. For more information regarding VerifireTM XL features, specifications, and characteristics, download the datasheet.