Extreme Ultraviolet (EUV) Detection: SXUV20HS1 High Speed Photodiode
Source: Opto Diode, An ITW Company

This high-speed photodiode has a Ø 5 mm circular active area and is ideal for laser power monitoring applications due to its repeatable measurements and stable responsivity. It covers the 1 to 200nm (EUV) range and can dissipate a high-powered UV laser’s optical energy without the usual measurement degradation that typically occurs after prolonged UV exposure.
Specifications include:
- 19.7 mm2 sensitive area
- Grid lines at 5 microns
- Pitch: 100 microns
- Shunt resistance: 5Mohms
- Capacitance: 200 pF (typical) to 800 pF (maximum)
For more information on the SXUV20HS1 photodiode’s features and specifications, download the datasheet.