Directly-Deposited Thin-Film Filter Photodetectors: AXUV100TF400 Datasheet

The AXUV100TF400 is a directly-deposited thin-film filter photodetector featuring 100 mm² square active area for extreme ultraviolet (EUV) detection. The device is designed for use in detecting solar EUV radiation, soft x-ray radiometry, x-ray and EUV lithography, x-ray microscopy and extreme vacuum ultraviolet (XUV) spectroscopy. The AXU100TF400 features typical responsivity of 0.15 A/W at 40 nm with a detection range from 18 nm to 80 nm. For additional information on the thin-film filter photodetectors, download the available datasheet.