Customizable DUV & EUV Photodiodes (AXUV & SXUV Series)

Opto Diode Corporation designs and manufactures fully customizable AXUV and SXUV photodiodes for deep ultraviolet (DUV) and extreme ultraviolet (EUV) detection, serving advanced semiconductor lithography, soft X-ray metrology, and scientific research. With U.S.-based wafer fabrication and ITAR-compliant production, these detectors provide high reliability and traceable performance tailored to precision optical systems.

Engineers can specify active area size, geometry, and spectral responsivity, with options ranging from compact detection areas to large 10 mm × 10 mm regions. Integrated thin-film filters—band-pass or long-pass—enable precise wavelength targeting from 1 nm to 190 nm, including EUV lithography at 13.5 nm and soft X-ray applications. Electrical parameters such as capacitance, rise time, and fall time can be optimized for fast response, and first-stage amplification can be integrated to match dynamic range and noise requirements.

The AXUV series delivers high quantum efficiency across the soft X-ray spectrum and can also serve as electron backscatter detectors. The SXUV series, engineered for durability in laboratory and industrial environments, offers stable performance and high in-band transmission with OD4–OD6 out-of-band blocking.

Available in sealed, low-outgassing packages for vacuum and cleanroom integration, these photodiodes reduce reliance on external optics and filters, simplifying integration and improving measurement accuracy. Applications include EUV lithography and power monitoring, CD-SEM, beamline metrology, semiconductor process monitoring, spaceborne UV detection, and precision industrial metrology.

With over four decades of photodiode design expertise, Opto Diode provides application-ready, customizable detection solutions that meet the demanding requirements of next-generation optical, scientific, and aerospace platforms.