Product/Service

Cryogenic Probe Station: Model CRX-6.5K

Source: Lake Shore Cryotronics, Inc.

This cryogenic probe station measures electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices through non-destructive testing on both full and partial wafers up to 51 mm in diameter. The typical materials measured in this system are semiconductors, nanoscale electronics, and quantum wires and dots. Sample holders, probes, cables, and other accessories are available to meet specific measurement application needs.

Based on a Sumitomo 6.5 K base temperature CCR, the CRX-6.5K Cryogenic Probe Station provides efficient temperature operation and control over a temperature range of <10 K to 350 K without the operating expense of liquid cryogens. An additional temperature range of 20 K to 675 K can be achieved through an interchangeable high temperature sample stage. A sensor and heater come equipped on the sample and radiation shield stages, resulting in fast thermal response and warm up for sample exchange. Blackbody radiation is intercepted before reaching the sample through actively cooled shielding, and small thermal gradients are achieved through probes cooled by the sample stage.

Careful design consideration was taken to provide a low vibration, user-friendly tool. Integrated vibration isolation and damping prevents CCR mechanical vibration from affecting measurement performance. Sample stage vibration is limited to less than 2 µm (X, Y, and Z axes) through the full-scale temperature range.

Cryogenic Probe Station: Model CRX-6.5K Features:

  • Closed cycle refrigerator provides high stability cryogen-free operation from <10 K to 350 K
  • Optional temperature range from 20 K to 675 K
  • Probes thermally anchored to the sample stage cooled to <25 K at base temperature
  • Probe arm sensor for monitoring probe temperature
  • Control stability to 20 mK
  • Sample exchange cycle time of 4 h
  • Low vibration design: <2 µm at sample stage
  • Measurements from DC to 67 GHz
  • Sample holders optimized for low noise, high frequency, or high impedance measurements
  • Accommodates up to 51 mm (2 in) diameter wafers
  • Configurable with up to six thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° planarization