Application Note

Coherent Artifact Reduction System (CARS)

Source: Zygo Corporation

Coherent Artifact Reduction System (CARS)

Obstructing artifacts in interferometric data can come in many different forms, such as a “bulls-eye,” which can be caused by dust on an optical surfaced in the coherent beam path of an interferometer. These artifacts can print through on the height map and affect the magnitude and repeatability of the surface results. As a solution, ZYGO offers the Ring of FireTM extended source method for reducing noise and other artifacts. Building on this expertise, ZYGO has also developed a coherent artifact reduction system (CARS) that reduces noise from wavefront shearing, speckle, or mottle by a factor of up to 10 and allows for surface features to be resolved. Download the application note for more information on CARS functionality and its different modes of operation.