AXUV20HS1 High-Speed EUV/DUV Photodiode With AXUV20ACS Precision Socket Datasheet

Opto Diode’s AXUV20HS1 is a high-speed circular photodiode engineered for precise detection across X-Rays, extreme ultraviolet Light (EUV), and deep ultraviolet (DUV).

Built for low-capacitance in our U.S. wafer-fab, the device delivers fast response, excellent linearity, and high stability for demanding semiconductor and scientific instrumentation.

The AXUV20HS1 integrates a 20 mm² active area with uniform responsivity, making it ideal for beamline diagnostics, vacuum-based metrology, and high-flux radiation monitoring. Its robust silicon design ensures low dark current and consistent performance under demanding environments. 

For easy assembly and repeatable alignment, the AXUV20HS1 pairs with the AXUV20ACS socket. The AXUV20ACS supports secure mounting, simplified replacement, and reliable thermal/mechanical stability in laboratory and OEM systems.

Key Features

• High-speed AXUV photodiode optimized for EUV/DUV/soft X-ray detection.
• 20 mm² active area with high responsivity from 1–190 nm
• Low capacitance for fast rise-time performance
• Stable response under high-energy illumination
• Precision ceramic AXUV20ACS socket for secure, repeatable mounting

Typical Applications

• EUV/DUV metrology & Electron Detection
• Beamline and synchrotron diagnostics
• Plasma monitoring
• Soft X-ray detection
• Vacuum-based scientific instruments