Datasheet | March 20, 2023

ZeGage Pro 3D Optical Profiler System Datasheet

The ZeGage Pro optical profiler provides non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces, ensuring quality control and process monitoring.

Our industry-leading ZeGage Pro-series sets the standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Built on ZYGO’s proprietary CSI technology, the ZeGage Pro delivers innovative technologies to enable precise, reliable, simple, and confident surface metrology.

Exclusive capabilities include SureScan™ technology for vibration robust metrology,  Part Finder, and Smart Setup for simplified part setup and optimized measurements.  It’s never been simpler to measure a wide variety of surfaces and parts, quickly and easily.

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