High accuracy 3-axis XY-Theta stages (XYT assemblies) are critical in many test and production processes related to laser precision machining, semiconductor and photonics test and production, and medical device manufacturing. PI offers a broad and deep solution set for integrated XY-Theta Motion Systems with Industrial Motion Controllers. These systems can be configured and supplied as individual components or as complete integrated motion systems with custom interfaces, cable management solutions, vacuum feedthroughs and application-optimized integrated granite and aluminum structures.
XY-Theta Precision Motion and Positioning Assemblies based on Air Bearing Stages
The engineering teams at PI have extensive expertise and experience with air bearing technology and multi-axis motion stage systems. The ultra-precision performance of engineered air bearing positioning systems along with their non-wearing nature make them ideal solutions for semiconductor applications involving combined linear and rotational motion.