Product/Service

Vacuum-Compatible 6-Axis Hexapod: H-824.V

vacuum compatible 6 axis hexapod

The H-824.V vacuum-compatible 6-axis hexapod from PI is compact, precise, and best suited for research and industry applications. Additional applications for this parallel positioner include micromanipulation, biotechnology, and semiconductor manufacturing.

The H-824.V positioner features a parallel-kinematic design for six degrees of freedom, making it significantly stiffer and more compact with higher reliability, and reduced friction. This product is suitable for vacuum environments to 10-6 hPa.

Additional Product Features Include:

  • Load capacity to 5 kg, self-locking version
  • Travel ranges to 45 mm / 25°
  • Min. incremental motion to 0.3 µm
  • Repeatability to ±0.1 µm / ±2 µrad
  • Velocity to 12.5 mm/s

For more features and specifications on the H-824.V, download the datasheet.