Uncooled Infrared Technology

Room-temperature infrared detectors produce IR images without costly and bulky dewars and coolers. Sarnoff utilizes surface micromachining to detect IR radiation on a bimaterial cantilever with much higher sensitivity than the current microbolometer or ferro-electric technology. Thermal movement of the bimaterial element is recorded through capacitive position measurement. The advantages include:

• No Johnson noise
• 100% silicon IC compatible
• Active circuitry at each pixel for uniformity correction
• Measured sensitivity of 20%/degree (40% feasible)
• Measured ROIC noise of 12.5 µV
• Measured thermal conductivity of 0.34 watt/meter-Kelvin permits isolation of 10⁸Kelvin/watt

  Potential applications for this approach include inexpensive infrared cameras and chemical sensors. The technology also supports subsystem solutions for optical projectors (replacing DMDs), IR scene generators, and others.

  Sarnoff Corporation, 201 Washington Road, CN5300, Princeton, NJ 08543-5300. Tel: 609-734-2000; Fax: 609-734-2040.