Ultratech Stepper Buys Fluorine Excimer Laser from Cymer
Source: Cymer, Inc.
As semiconductor feature sizes continue to shrink, industry researchers are focusing more and more on 157 nm lithography. Ultratech Stepper Inc. (San Jose, CA) has purchased a 157-nm fluorine (F2) excimer laser from Cymer, Inc. (San Diego) for integration into a small-field microstepper lithography tool for next- generation lithography process development applications. The laser is slated to ship to Ultratech's Wilmington, Mass. facility during the first quarter of 2000.
Operating at 1000 Hz, the ELX-6500F2 fluorine laser incorporates an internal energy monitor to ensure dose stability.