Transmission and Reflectivity Measurements for Optical Coating Characterization

Multilayer-dielectric (MLD) coated optics are often used in laser systems operating at 193nm because of their ability to deliver optimum performance and maintaining functionality after millions, and sometimes even billions, of pulses. Achieving peak optical performance requires accurate transmission and reflectivity measurements of coated optics in these systems for an accurate evaluation of the inherent loss within the coating. This technical note discusses how to accurately characterize MLD coated optics to help prevent premature failure in a 193nm laser system.