Therma-Wave Supplies Metrology Tools for AMD Fab

To equip its new semiconductor fabrication facility in Dresden, Germany, Advanced Micro Devices (AMD; Sunnyvale, CA) has contracted to purchase a variety of optically-based semiconductor film measurement tools from Therma-Wave (Fremont, CA). The multiple-system order encompasses a number of Opti-Probe film measurement tools, including a deep-ultraviolet-based system to monitor the thickness of multilayer stacks. AMD's Fab 30 is slated to produce 200 mm wafers for microprocessors starting at 0.25 µm and migrating to 0.15 µm and below.