These materials are tested and certified to have minimum internal transmission levels and absorption coefficients at Excimer laser lines. Both grades are refined to produce uniform index homogeneity in the primary direction. Suprasil ®1 ArF/KrF is additionally refined to produce uniform index homogeneity in all three directions. These materials are ideal for DUV Excimer optics requiring excellent optical performance.
Extinction @ 193nm : k193 <= 3x10-3/cm Extinction @ 248nm : k248 <= 9x10-4/cm
Internal Transmission *: @ 193nm: >=99.3%, @ 248nm: >= 99.8%
The Internal Transmission of an optical element of thickness (d in cm) is (including reflection loss): T=(1-R)2 10-kd
Suprasil ® 1 ArF/KrF: for high optical performance DUV Excimer 3D optics such as prisms, beam splitters, and polarizers.
Suprasil ®2 ArF/KrF: for high optical performance DUV Excimer 2D optics such as windows and lenses.
For applications requiring good DUV through Visible with lower damage resistance, Heraeus Suprasil ®1 and Suprasil® 2 are common tradeoffs. For high radiation resistance and lower optical performance and cost, Suprasil ® UVL is a common tradeoff.
Contact Heraeus for additional information on their 1.0 Synthetic Fused Silica for High Optical Performance - DUV Excimer Optics.