Surface Profiler
The WYKO SP3200 Surface Profiler is a non-contact, 3-D optical profiler that functions as both surface metrology
The WYKO SP3200 Surface Profiler is a non-contact, 3-D optical profiler that functions as both surface metrology instrument and defect inspection tool. As a defect inspection tool, the profiler automatically detects solder bridges, under and oversized bumps, missing and extra solder bumps, and bump position. For surface metrology, the system calculates bump height, diameter, volume, as well as three-point and regression coplanarity. In addition, the WYKO SP3200 enables users to control critical dimensions and determine the electrical/mechanical performance and reliability of advanced packaging substrates.
Veeco Process Metrology, 2650 East Elvira Rd., Tucson, AZ 85706. Tel: 520-741-1044, Fax: 520-294-1799.