A common tradeoff to, Suprasil ® 1 ArF/KrF and Suprasil ® 2 ArF/Kr, this material is not refined, made in homogeneous ingot form and will have higher index variation across the optical aperture. This material is ideal for DUV Excimer optics & other high energy optics requiring lower optical performance and cost to higher performance alternatives.
Suprasil UVL is well suited for: light pipes, DUV mirrors, optical windows & lenses requiring lower TWE performance.
Refractive Index Homogeneity1) <– 10 ppm –
lower values upon request
Visible striae Free in 3 Directions
Per ISO 10110-4 Class 5 in Functional Direction
Per MIL-G-174B Grade A in Functional Direction
Birefringence / Residual Strain1)
(Typical values) <= 5nm/cm
Bubble class (DIN 58927) 0
Maximum number of inclusions2) 0
Fluorescence (254 nm excitations) None
1) Stress induced birefringence and optical homogeneity are valid for 80 % of the diameter of an ingot or for 90 % diameter of a machined component.
2) Bubbles and Inclusion with ø <– 80 µm are not counted. Inclusion free down to 10 µm upon request.
Contact Heraeus regarding this fused silica materials for DUV Excimer Optics.