Silicon Photonics Wafer Prober: 6-DOF-Hexapod Pivot Point Demo
Source: PI (Physik Instrumente) LP
The pivot point demo shows the advantages of a programmable pivot point in hexapod parallel kinematics active alignment systems. The PI H-811 Hexapod 6-axis motion system and P-616 piezo nano-scanner are mounted on a Cascade Microtech wafer prober.
PI (Physik Instrumente) LP
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