White Paper: MEMS Optical Modulator

The Boston Micromachines Corporation (BMC) MEMS Optical Modulator was designed for use in free space optical communication systems. The modulator is a reflective, very-low-modulation diffraction grating with controllable groove depth. It is capable of continuous far field intensity variation of a reflected laser beam by switching between an unpowered flat mirror-state to a powered diffractive-state. The device design is based on BMC's heritage deformable mirror technology that uses hysteresis free electrostatic actuators to periodically deform a continuous mirror facesheet.