Brochure: PZ2000 - Automatic Laser Ellipsometer/Reflectometer Measurement Of Thickness, Refractive Index And Reflectivity
Source: HORIBA Jobin Yvon
The PZ2000 is an automatic thin-film measurement
system for substrates of up to 300 mm diameter.
Based on the technique of ellipsometry and reflectometry, the tool is capable of
determining the thicknesses, refractive index, absorption constants and
reflectivity of thin films from 0 nm up to several microns.
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