White Paper: Nano-Scale Imaging/Fabrication Advances Driven By Piezoelectric Active Vibration Control

By Wes Wigglesworth, Technical Manufacturing Corporation, and Scott Jordan, PI (Physik Instrumente) L.P.

Abstract

Engineers from TMC and PI have developed active vibration isolation technology based on piezo ceramic solid state actuators that has become an established solution in nano-lithography applications. However, active vibration cancellation can also improve stability and resolution in super-resolution microscopy applications.

Based on digital signal processing algorithms and responsive PI piezo technology with the latest ultra-reliability enhancements, patented STACIS active isolators have proven their dependability in mission-critical fab deployment for over a decade. STACIS is now available in small form-factors ideal for emerging applications ranging from advanced microscopies to nanomanufacturing.