Brochure | June 28, 2006

Brochure: Spectroscopic Ellipsometry

Source: HORIBA Jobin Yvon
Ellipsometry is an optical non destructive technique allowing the accurate characterization of thin films, surface and interface. It is capable of determining layer thickness from 1 Å to tens of microns, optical constants, composition, anisotropy, crystallinity and uniformity.
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