Semiconductor Wafer Inspection Stage – Nanometer Precision In Multi-Axis, High Performance Motion Control
Source: PI (Physik Instrumente) LP
Combining air bearing technologies, piezo nanopositioning actuators, and piezo motors with precision guiding systems allows a motion solution that covers large areas while achieving the highest resolution and accuracy. Check out the video for more information.
PI (Physik Instrumente) LP
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