Datasheet: S10043 SiIicon Photodiode

The S10043 silicon photodiode for ArF excimer laser detection in immersion lithography and for other UV detection applications provides a 10 mm x 10 mm active area in a windowless package, and covers a spectral response range from 190 nm to 1000 nm. Its key feature is exceptional stability in the detection of high-power ArF 193 nm excimer lasers.

Following exposure to an ArF excimer laser of 1 kJ/cm2, the new photodiode retains approximately 100% of its sensitivity, whereas some conventional photodiodes can lose up to 10% of their sensitivity under the same conditions. The S10043's enhanced robustness was made possible by a new process for manufacturing highly durable ultra-thin metal films and other Hamamatsu technology.