Precision XY Linear Translation Stage for Metrology

Source: PI (Physik Instrumente) LP

Precision XY Linear Translation Stage for Metrology

PI’s miCos is an XY precision linear translation with a travel range of 102 mm x 102mm (4”). It features uni-directional repeatability down to 0.1µm, a 200mm/sec maximum speed, a load capacity to 20 kg, and integrated optical limit switches.

Request Information
Click Here To Download:

This translation stage is well suited for surface metrology, topographical measurements in semiconductor test and inspection, flat-panel manufacturing, materials research, optical inspection of precision machined parts, and other applications involving industrial metrology. It’s been designed to combine industrial robustness, high accuracy and precision, and a high load bearing capacity.

The miCos XY precision linear stage can handle up to 45 lbs, while still providing high resolution and 0.2µm repeatability. Closed and open-looped stepper motors are available for varying applications requirements. Contact PI for more information.

Need More Information? Just Ask.

Click the button below to directly contact the supplier. Use it to:

  • Ask a question.
  • Request more detailed information or literature.
  • Discuss your current project/application.
  • Request a quote.
  • Locate a distributor in your area.
  • Schedule a demo.
Request Information