Product/Service

Precision XY Linear Translation Stage for Metrology

Source: PI (Physik Instrumente) LP

Precision XY Linear Translation Stage for Metrology

PI’s miCos is an XY precision linear translation with a travel range of 102 mm x 102mm (4”). It features uni-directional repeatability down to 0.1µm, a 200mm/sec maximum speed, a load capacity to 20 kg, and integrated optical limit switches.

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This translation stage is well suited for surface metrology, topographical measurements in semiconductor test and inspection, flat-panel manufacturing, materials research, optical inspection of precision machined parts, and other applications involving industrial metrology. It’s been designed to combine industrial robustness, high accuracy and precision, and a high load bearing capacity.

The miCos XY precision linear stage can handle up to 45 lbs, while still providing high resolution and 0.2µm repeatability. Closed and open-looped stepper motors are available for varying applications requirements. Contact PI for more information.