Product/Service

PIglide RLA Rotation Stage With Air Bearings: A-68x

csm_A-688_6c5542d666

The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large, clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Application fields include tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning.

Additional Product Features:

  • 365 mm diameter motion platform, 260 mm diameter aperture
  • Low profile
  • Eccentricity and flatness < 300 nm

For more information on this product, download the available datasheet.