Product/Service

PIglide High-Precision Z Tip/Tilt Stage With Air Bearings: A-523

A-520_Tip_Tilt_Z_Stage

The A-523 by PI is an air bearing Z tip/tilt stage with direct drive. The Z tip/tilt stage is ideally suited for high-precision applications including wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing.

This low-profile product is cleanroom compatible and high performing.

Additional Features Include:

  • Travel range in Z to ±2.5 mm
  • Rotation range in θX, θY to ±1°
  • Load capacity to 8 kg
  • Platform diameter 250 mm
  • Overall height 60 mm 

For more features and specifications on the A-523, download the available datasheet.

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