P-616.65S NanoCube® 6-Axis Piezo System Datasheet

The P-616.65S NanoCube® is a compact, parallel-kinematic, 6-axis piezo system designed for ultra-precise nanopositioning and demanding applications like fiber alignment in photonics and integrated optics.

Key Features & Performance

This system offers a travel range of±250 μm in X, Y, and Z, and tip/tilt rotation angles up to±26.2mrad in OX, OY, and OZ. Its parallel-kinematic design ensures the highest stiffness in all spatial directions, allowing for fast, dynamic, and precise multi-axis motion with minimum mass inertia.

The system uses PICMA® piezo actuators, which are all-ceramic insulated for outstanding lifetime—proven up to 1 billion cycles without failure—and superior protection against humidity. Guiding is achieved through zero-play flexure guides, which are maintenance-free, friction-free, and insensitive to shock and vibration.

Operation and Specifications

A key operational feature is the freely selectable center of rotation. Software allows any point in space to be chosen as the center of rotation for the platform's tilting and rotating motions. Position is directly measured using integrated SGS sensors

Performance specifications include a bidirectional repeatability of typically 40 nm in linear axes and 4μrad in rotation. The device has a resonant frequency of 350 Hz unloaded in X, Y, and Z directions, an overall mass of 995 g, and utilizes a recommended controller/driver, such as the E-713.6SDA.