White Paper

Optical Semiconductor Inspection

Source: Vision Research, Inc.
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Optical semiconductor inspection presents complex challenges, including the diminutive size of the target and proximity of individual dies in the wafer space. This paper addresses the challenges that can arise during the semiconductor inspection process, including reticle inspection in patterned and unpatterned wafers, the identification and flagging of deformed wires, and the presence and absence of features. Download the full white paper to learn more.

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