Nitrogen Trifluoride (NF3) production facility funded by BOC Edwards and Pelchem

Construction has begun on a Nitrogen Trifluoride (NF3) production facility at Pelchem's site in Pelindaba, South Africa. The facility is the product of the joint investing of BOC Edwards (Wilmington, MA) and Pelchem, the Chemical Division of NECSA (formerly AEC).

The project's initial phase will involve a capacity of 250,000 kg/yr (550,000 lb/yr). The companies believe that this joint investment will provide the additional capacity required to support the growth of the semiconductor industry.

The prime growth drivers for NF3 have been as a chamber-cleaning gas in CVD (chemical-vapor deposition) semiconductor production processes and in LCD (liquid crystal display) production processes. NF3 is also used as an etchant in semiconductor manufacturing. NF3 provides the benefit of lower PFC (perfluorocarbon) emissions as compared to alternate cleaning gases. The new facility is designed to supply grades of product for each of these applications.

BOC Edwards will be responsible for marketing and distributing the NF3 product through its global distribution network, with facilities serving the worldwide semiconductor manufacturing markets. Project financing, including an equity investment, will be provided by the Industrial Development Corporation of South Africa.

Edited by Maeve McKenna