Newport Introduces First Direct-Drive Motorized Rotation Stage for High-Throughput Semiconductor Wafer Inspection
Irvine, California, USA – Newport's revolutionary new RGV100 Direct-Drive Motorized Rotation Stage brings higher speeds, greater reliability, and higher precision, plus an ultra-low profile to semiconductor wafer inspection and related applications.
The direct-drive technology of the RGV100 eliminates the worm gear of traditional rotation stages, providing faster rotating speeds, superior reliability, and enhanced position sensitivity to applications that include precision metrology, semiconductor wafer inspection, micro-robotics, MEMS, and more. Its unique design makes the RGV100 the lowest profile direct-drive rotation stage available on the market today - only 49 mm in height, with unmatched price/performance advantages to the customer. A large 50 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage, critical for semiconductor applications.
The RGV100 features a high efficiency DC torque motor with rare earth magnets. It supplies an optimum ratio of torque per volume for high acceleration rates with minimum stage heating. Compared to brushless motors, DC torque motors allow the use of conventional motion electronics with no additional costs associated with electronic motor commutation. Precision is ensured by a proprietary, high-resolution glass scale with 18,000 line counts per revolution that directly reads the position of the rotating platform. Resolution is 0.0001 deg.; Uni-directional repeatability is 0.0003 deg.; and accuracy is 0.01deg., with an average MTBF of 20,000 hours.
The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage's rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. A once-per revolution index pulse permits precision homing to a unique position.
In making the announcement, Walter Silvesky, Senior Business Development Manager, Advanced Motion Products, said, "The RGV100 delivers a quantum leap in performance and precision. Speed, resolution, and repeatability are increased by a factor of up to ten times compared to worm-driven rotation stages of the same size. It's another example of Newport's constant innovation and leadership in the semiconductor industry."
Newport Corporation is a leading global supplier of advanced technology products and systems to the semiconductor, communications, electronics and research markets. The company provides components and integrated subsystems to manufacturers of semiconductor processing equipment, advanced automated assembly and test systems to manufacturers of communications and electronics devices, and a broad array of high-precision components and instruments to commercial, academic and government customers worldwide. Newport's innovative solutions leverage its expertise in precision robotics and automation, sub-micron positioning systems, vibration isolation and optical subsystems to enhance the capabilities and productivity of its customers' manufacturing, engineering and research applications. Newport is part of the Standard & Poor's Midcap 400 Index and the Russell 2000 Index. For more information, visit www.newport.com.