New Entry-Level Excimer Laser Delivers High Coherence

Göttingen, Germany — The new OPTex Pro-T from Lambda Physik is the first compact, entry-level excimer laser to offer high spatial and temporal coherence, as well as wavelength tunability; these specialized characteristics are normally only found in high-end excimer lasers. OPTex Pro-T lasers are available at two deep UV wavelengths:193 nm and 248 nm. These air-cooled lasers deliver pulse energies up to 2 mJ, with a linewidth of <5 pm and pulse repetition rates up to 200 Hz, as well as a burst mode up to 500 Hz.

The new laser is based on the proven OPTex Pro platform. The coherence and tunability are the result of a high efficiency optics module comprising a prism beam expander and a dispersion grating. This T-module incorporates a nitrogen purge to suppress oxygen absorption that can be an issue at these short wavelengths. The purge also maximizes the output power and optics lifetimes by eliminating dust contamination.

The OPTex Pro-T has been designed for applications that critically depend on refined laser coherence parameters and/or tunability of the laser wavelength. Examples include Interference Lithography, Remote Sensing of Molecules, and Laser Induced Fluorescence in combustion analysis

Lambda Physik is a worldwide technology leader for pulsed UV and tunable laser sources for lithography, industrial, scientific and medical applications. For more information, visit our website at www.lambdaphysik.com.

Source: Lambda Physik