The NanoSensor® is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates, a Target and a Probe, form a parallel plate capacitor, to be used in metrology, stage control, microscopy, and many other applications.
The spacing of these two plates can be measured using the appropriate electronic controller, to better than 7pm, with a range up to 1.25mm, a frequency response up to 10KHz and linearity down to 0.02%. Because the NanoSensor is a non-contact method, it is free from hysteresis. No power is dissipated at the point of measurement.
Additional Product Features Include:
- Sub-nanometer position resolution
- Zero hysteresis
- Linearity error down to 0.02%
- Bandwidth up to 10 kHz
- High thermal stability construction (Super invar, zerdur and ceramic options available)
- UHV, Radiation, Cryogenic, Nonmagnetic, etc. Variants
For more information on this product, download the available datasheet.