Nanometrics Introduces VerteX Rapid Photoluminescence Mapping System
Milpitas, CA - Nanometrics, Inc., supplier of both advanced integrated and standalone metrology equipment for the semiconductor and related industries, introduced recently its VerteX rapid photoluminescence (PL) mapping system used for compound semiconductor production control during volume manufacturing of optoelectronic devices, such as light emitting diodes (LEDs). According to Nanometrics, the tool marks the first automated PL mapping system that accurately predicts emission wavelengths for green LEDs at the wafer level. Green LEDs are vital for RGB-based LED displays and solid-state lighting applications.
This is Nanometrics' initial product launch since completing its acquisition earlier this year of Accent Optical Technologies, Inc., supplier of overlay and thin-film metrology and process control systems.
Nanometrics asserts that VerteX's superior control of laser excitation conditions allows for accurate matching of PL data to electroluminescence (EL) test information, resulting in faster run-to-run epitaxial layer growth feedback. This enables the predictive metrics required for volume production of LEDs, particularly green LEDs. VerteX complements Nanometrics' portfolio of wafer inspection systems, including the industry-standard RPM2000, desktop PL mapping system, and it adds another important component to the company's closed-loop advanced process control (APC) capabilities, enabling a predictive metrics strategy for its customers.
Conventionally, the exact emission wavelength of a green LED can only be measured by an electrical test after the wafer has been fully processed. VerteX, however, is said to have the capability to forecast diode performance before the wafer is fully processed, providing the critical data needed to actively adjust process controls for optimal epitaxial layer growth — the yield-limiting step in LED production. The tool also can be used in manufacturing a wide range of optoelectronic materials, including ultraviolet (UV) diode lasers for high-definition DVD and Blu-Ray optical disc appliances.
SOURCE: Nanometrics, Inc.