Miniature Piezo Stages With Bi-Phase Inertia Motors

PI’s B-421 BIX nanopositioning stages are ultra-compact, high-precision motion systems engineered for applications requiring accurate, reliable linear movement in limited space. Featuring integrated linear encoders and dual-phase piezo inertia motors, BIX stages deliver backlash-free, smooth motion with a minimum incremental movement of just 10 nanometers. These systems are ideal for demanding fields such as metrology, super-resolution microscopy, life sciences, photonics, and semiconductor research.

Unlike traditional stick-slip motor stages, BIX stages incorporate two miniature piezo stacks, developed in-house by PI Ceramic. This bi-phase inertia drive technology provides higher drive and holding forces, longer operational life, and faster movement than standard stick-slip systems. Travel ranges up to 32 mm and flexible configurations in XY, XZ, and XYZ make the BIX series suitable for multi-axis applications and complex assemblies.

The piezoelectric drive principle relies on a modified sawtooth voltage waveform, enabling movement by leveraging inertia during rapid contraction phases. This design ensures symmetrical performance in both directions, essential for nanometer-precision tasks.

Control is handled by the E-881 BIX controller, optimized for two-phase piezo motors. It integrates encoder feedback and digital electronics, offering smooth, precise motion control. Communication is supported via USB and TCP/IP, and it’s compatible with PI’s PIMikroMove® software. The controller supports programming through multiple environments, including C/C++, LabVIEW, MATLAB, and Python. A virtual emulator also allows software testing without hardware.