ASI’s LS series of linear stages features three models with 50, 100, and 200 mm travel ranges. Each stage has less than 0.1µm resolution (10 nm with linear encoder), less than 0.7µm RMS repeatability (200 nm with linear encoder), 0.25 µm per mm accuracy (+3 µm per length of scale with linear encoder), and 7 mm/sec maximum velocity.
These linear stages achieve precise control through the use of closed-loop DC servomotors. High resolution rotary encoders are also used to provide positioning feedback. Even greater positioning accuracy is also available through the use of an optional linear encoder. For more information, download the datasheet. You can also contact ASI directly to request more information.