Product/Service

Linear Stage With The Highest Force And Precision: N-332

PI - N-332

The N-332 linear stage, powered by PICMAWalk, the longest-lasting piezo-motorized drive principle on the market, delivers an impressive 75 N active force with a 3 nm minimum incremental motion.

Features

  • 75 N active force
  • 3 nm minimum incremental motion
  • Robust PICMAWalk technology for extreme durability
  • Self-locking when switched off: Saves energy and reduces generation of heat
  • Plug-and-play, thanks to PI proprietary controller technology
  • UHV-compatible design
  • Multi-axis setups possible: XY, XZ and XYZ

Nanometer precision and high feed force with PICMAWalk drives

In the PICMAWalk drive, several piezo actuators make a walking motion that leads to the feed of a runner. Control of the actuators enables the smallest step and forward feed movements with nanometer resolution.

In contrast to other piezo-motorized drive principles, PICMAWalk walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PICMAWalk walking drives are self-locking, consume no energy, and do not generate heat.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

N-332.xxU/.xxUY models are designed for use in a vacuum. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Application fields

  • Scanning electron microscopy (SEM) / transmission electron microscopy (TEM) in life sciences and semiconductor manufacturing
  • Highest-resolution microscopy, particularly 4Pi microscopy
  • Nanoindentation